Sub-100nm Lithography: Market Analysis And Strategic Issues

Chapter 1  Introduction                                                                  1-1

 

1.1     The Need For This Report                                                         1-1

 

Chapter 2  Executive Summary                                                      2-1

 

2.1     Summary of Major Issues                                                         2-1

2.2     Summary of Market Opportunities                                            2-2

 

Chapter 3  Lithography Issues And Trends                                      3-1

 

3.1     Optical Systems                                                                       3-1

          3.1.1     Introduction                                                                 3-1

          3.1.2     Step-and-Repeat Aligners                                              3-8

          3.1.3     Deep Ultraviolet (DUV)                                                3-11

3.2     EUV                                                                                         3-18

3.5     Nano-Imprint Lithography                                                        3-23

3.4     X-Ray Lithography                                                                   3-28

3.3     Electron Beam Lithography                                                      3-34

3.4     Ion Beam Lithography                                                              3-38

 

Chapter 4  User - Supplier Strategies                                               4-1

 

4.1     Determining Lithography Needs                                                4-1

4.2     Benchmarking a Vendor                                                           4-3

          4.2.1  Pricing                                                                            4-3

          4.2.2  Vendor Commitment and Attitudes                                4-5

          4.2.3  Vendor Capabilities                                                         4-7

          4.2.4  System Capabilities                                                         4-9

          4.2.5  Vendor Feedback During Equipment Evaluation             4-9

          4.2.6  Vendor Feedback During Device Production                    4-11

4.3     Competitive Environment                                                        4-12

4.4     Equipment For Class 1 Cleanrooms                                           4-15

4.5     Equipment For the Factory of the Future                                   4-18

4.6     Opportunities                                                                           4-19

 

 

Chapter 5  Market Forecast                                                             5-1

 

5.1     Driving Forces                                                                          5-1

          5.1.1  Technical Trends                                                             5-4

          5.1.2  Economic Trends                                                            5-5

          5.1.3  Optical Limitations                                                         5-9

5.2     Market Forecast Assumptions                                                   5-10

5.3     Market Forecast                                                                       5-11

 

 

 

LIST OF TABLES

 

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3.1     Wavelength “Generations”                                                        3-5

3.2     Characteristics of X-Ray Systems                                              3-29

5.1    Worldwide Capital Spending                                                    5-6

5.2     DRAM Lithographic Requirements                                          5-8

5.3     Worldwide Optical Stepper Market                                            5-20

5.4     Worldwide Stepper Market Shares                                            5-23

 

 

 

 

 

 

 

 

 

LIST OF FIGURES

 

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1.1     Lithographic Equipment Requirements for DRAMs                  1-2

3.1     Lithography Options For MPUs/DRAMs                                   3-6

3.2     Lithography Options For Flash                                                  3-7

3.3     Illustration of Stepper Exposure System                                    3-9

3.4     Lens Arrangement For Submicron Features                               3-14

3.5     Excimer Laser Evolution                                                           3-15

3.6     EUV Lithography                                                                     3-18

3.7     Thermoplastic Nanoimprint Lithography Process                       3-23

3.8     Step And Flash Nanoimprint Lithography Process                     3-25

3.9     Illustration of X-Ray Lithography                                             3-30

3.10   Schematic Of Scalpel Electron Beam System                             3-34

3.11   Multi-Source E-Beam Lithography                                            3-36

3.12   Ion Projection Lithography System                                           3-39

4.1     Manufacturing Costs Per Exposure Station                               4-2

5.1     Lithography Market Vs Equipment Market                                5-13

5.2     Lithography Double Exposure Technique                                  5-15

5.3     Lithography Requirements                                                        5-16

5.4     Lithography Extensions                                                            5-17

5.5     Lithography Cost of Ownership                                                 5-18

5.6     Segmentation of Stepper/Scan Shipments                                  5-21

5.7     Market Shares of Vendors (Units)                                              5-22

5.8     Unit Market Shares of Vendors                                                 5-24

5.9     Worldwide I-Line Market Shares                                               5-25

5.10   Worldwide 248nm Market Shares                                              5-26

5.11   Worldwide 193nm Dry Market Shares                                       5-27

5.12   Worldwide 193nm Wet Market Shares                                       5-28

5.13   Market Shares of Vendors (Revenues)                                       5-30